| Original language | English |
|---|---|
| Pages (from-to) | 30-39 |
| Number of pages | 10 |
| Journal | Sensors and Actuators, A: Physical |
| Volume | 82 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 15 May 2000 |
| Externally published | Yes |
| Event | The 10th International Conference on Solid-State Sensors and Actuators TRANSDUCERS '99 - Sendai, Jpn Duration: 7 Jun 1999 → 10 Jun 1999 |
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