| Original language | English |
|---|---|
| Article number | 87250L |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 8725 |
| DOIs | |
| Publication status | Published - 2013 |
| Event | 2013 Micro- and Nanotechnology Sensors, Systems, and Applications V Conference - Baltimore, MD, United States Duration: 29 Apr 2013 → 3 May 2013 |
Keywords
- CMOS
- Cupric oxide
- Gas sensors
- Heterogeneous integration
- Micro-hotplates
- Nanowires
- Tin oxide
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