@inproceedings{fa7529693cb9416f9ecf73b2ce546a51,
title = "Measuring doping profiles with spreading resistance profiling",
author = "W. Treberspurg and T. Bergauer and M. Dragicevic and M. Krammer",
year = "2012",
doi = "10.1142/9789814405072\_0103",
language = "English",
isbn = "981440506X",
series = "Astroparticle, Particle, Space Physics and Detectors for Physics Applications - Proceedings of the 13th ICATPP Conference",
publisher = "World Scientific Publishing Co. Pte Ltd",
pages = "693--697",
booktitle = "Astroparticle, Particle, Space Physics and Detectors for Physics Applications - Proceedings of the 13th ICATPP Conference",
note = "13th International Conference on Advanced Technology and Particle Physics, ICATPP 2011 ; Conference date: 03-10-2011 Through 07-10-2011",
}