Implementing virtual metrology into semiconductor production processes - An investment assessment

Matthias Koitzsch; Jochen Merhof; Markus Michl; Humbert Noll; Alexander Nemecek; Alfred Honold; Gerhard Kleineidam; Holger Lebrecht

doi:10.1109/WSC.2011.6147915

Implementing virtual metrology into semiconductor production processes - An investment assessment

Matthias Koitzsch
, Jochen Merhof
, Markus Michl
, Humbert Noll
, Alexander Nemecek
, Alfred Honold
, Gerhard Kleineidam
, Holger Lebrecht

University of Applied Sciences Wiener Neustadt

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Citations (Scopus)

Original language	English
Title of host publication	Proceedings of the 2011 Winter Simulation Conference, WSC 2011
Pages	2017-2028
Number of pages	12
DOIs	https://doi.org/10.1109/WSC.2011.6147915
Publication status	Published - 2011
Event	2011 Winter Simulation Conference, WSC 2011 - Phoenix, AZ, United States Duration: 11 Dec 2011 → 14 Dec 2011

Publication series

Name	Proceedings - Winter Simulation Conference
ISSN (Print)	0891-7736

Conference

Conference	2011 Winter Simulation Conference, WSC 2011
Country/Territory	United States
City	Phoenix, AZ
Period	11/12/11 → 14/12/11

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10.1109/WSC.2011.6147915

Cite this

Koitzsch, M., Merhof, J., Michl, M., Noll, H., Nemecek, A., Honold, A., Kleineidam, G., & Lebrecht, H. (2011). Implementing virtual metrology into semiconductor production processes - An investment assessment. In Proceedings of the 2011 Winter Simulation Conference, WSC 2011 (pp. 2017-2028). Article 6147915 (Proceedings - Winter Simulation Conference). https://doi.org/10.1109/WSC.2011.6147915

@inproceedings{7b217183958f46feb1fd9d5a3559ce17,

title = "Implementing virtual metrology into semiconductor production processes - An investment assessment",

author = "Matthias Koitzsch and Jochen Merhof and Markus Michl and Humbert Noll and Alexander Nemecek and Alfred Honold and Gerhard Kleineidam and Holger Lebrecht",

note = "Funding Information: This research was supported by the U. S. Army Research Office under the contract number DAAG55-98-1-0215.; 2011 Winter Simulation Conference, WSC 2011 ; Conference date: 11-12-2011 Through 14-12-2011",

year = "2011",

doi = "10.1109/WSC.2011.6147915",

language = "English",

isbn = "9781457721083",

series = "Proceedings - Winter Simulation Conference",

pages = "2017--2028",

booktitle = "Proceedings of the 2011 Winter Simulation Conference, WSC 2011",

}

Koitzsch, M, Merhof, J, Michl, M, Noll, H, Nemecek, A, Honold, A, Kleineidam, G & Lebrecht, H 2011, Implementing virtual metrology into semiconductor production processes - An investment assessment. in Proceedings of the 2011 Winter Simulation Conference, WSC 2011., 6147915, Proceedings - Winter Simulation Conference, pp. 2017-2028, 2011 Winter Simulation Conference, WSC 2011, Phoenix, AZ, United States, 11/12/11. https://doi.org/10.1109/WSC.2011.6147915

Implementing virtual metrology into semiconductor production processes - An investment assessment. / Koitzsch, Matthias; Merhof, Jochen; Michl, Markus et al.
Proceedings of the 2011 Winter Simulation Conference, WSC 2011. 2011. p. 2017-2028 6147915 (Proceedings - Winter Simulation Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Implementing virtual metrology into semiconductor production processes - An investment assessment

AU - Koitzsch, Matthias

AU - Merhof, Jochen

AU - Michl, Markus

AU - Noll, Humbert

AU - Nemecek, Alexander

AU - Honold, Alfred

AU - Kleineidam, Gerhard

AU - Lebrecht, Holger

N1 - Funding Information: This research was supported by the U. S. Army Research Office under the contract number DAAG55-98-1-0215.

PY - 2011

Y1 - 2011

UR - https://www.scopus.com/pages/publications/84858025719

U2 - 10.1109/WSC.2011.6147915

DO - 10.1109/WSC.2011.6147915

M3 - Conference contribution

AN - SCOPUS:84858025719

SN - 9781457721083

T3 - Proceedings - Winter Simulation Conference

SP - 2017

EP - 2028

BT - Proceedings of the 2011 Winter Simulation Conference, WSC 2011

T2 - 2011 Winter Simulation Conference, WSC 2011

Y2 - 11 December 2011 through 14 December 2011

ER -

Implementing virtual metrology into semiconductor production processes - An investment assessment

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