Design and Simulation of an Integrated Micro-Hotplate for Gas Sensing Applications

Research output: Contribution to conference › Paper › peer-review

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TY - CONF

T1 - Design and Simulation of an Integrated Micro-Hotplate for Gas Sensing Applications

AU - A, Nemecek

AU - M, Siegele

AU - C, Gamauf

AU - J, Teva

AU - J, Kraft

AU - F, Schrank

AU - H, Noll

PY - 2013/9

Y1 - 2013/9

UR - https://www.mendeley.com/catalogue/b3e741ee-4bae-3c88-9f90-95d80dfbe927/

U2 - 10.3850/978-981-07-3353-7_279

DO - 10.3850/978-981-07-3353-7_279

M3 - Papier

ER -