Time-resolved Ion Energy and Charge Distributions in Pulsed Cathodic Arc Plasmas of Nb-Al Cathodes in High Vacuum

Siegfried Zöhrer, Robert Franz, André Anders

Publikation: Konferenzbeitrag › Abstract › peer-review

Originalsprache	Englisch
Publikationsstatus	Veröffentlicht - 23 Apr. 2018
Extern publiziert	Ja
Veranstaltung	International Conference on Metallurgical Coatings and Thin Films - San Diego, USA/Vereinigte Staaten Dauer: 23 Apr. 2018 → 27 Apr. 2018 Konferenznummer: 45

Konferenz	International Conference on Metallurgical Coatings and Thin Films
Kurztitel	ICMCTF
Land/Gebiet	USA/Vereinigte Staaten
Ort	San Diego
Zeitraum	23/04/18 → 27/04/18

Dieses zitieren

@conference{5effbdb2539c4893a1bfdb5a1e29d2ff,

title = "Time-resolved Ion Energy and Charge Distributions in Pulsed Cathodic Arc Plasmas of Nb-Al Cathodes in High Vacuum",

author = "Siegfried Z{\"o}hrer and Robert Franz and Andr{\'e} Anders",

year = "2018",

month = apr,

day = "23",

language = "English",

note = "International Conference on Metallurgical Coatings and Thin Films, ICMCTF ; Conference date: 23-04-2018 Through 27-04-2018",

}

TY - CONF

T1 - Time-resolved Ion Energy and Charge Distributions in Pulsed Cathodic Arc Plasmas of Nb-Al Cathodes in High Vacuum

AU - Zöhrer, Siegfried

AU - Franz, Robert

AU - Anders, André

N1 - Conference code: 45

PY - 2018/4/23

Y1 - 2018/4/23

M3 - Abstract

T2 - International Conference on Metallurgical Coatings and Thin Films

Y2 - 23 April 2018 through 27 April 2018

ER -