Scheduling of automated wet-etch stations

Publikation: Beitrag in Fachzeitschrift › Artikel › peer-review

Originalsprache	undefiniert/unbekannt
Fachzeitschrift	Chemical Engineering Transactions
DOIs	https://doi.org/10.3303/CET1439073
Publikationsstatus	Veröffentlicht - 2014
Extern publiziert	Ja

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@article{cd4599943f7242c7b6cb7da6446d20aa,

title = "Scheduling of automated wet-etch stations",

author = "M. Hegyh{\'a}ti and O. Osz and B. Kov{\'a}cs and F. Friedler",

year = "2014",

doi = "10.3303/CET1439073",

language = "Undefined/Unknown",

journal = "Chemical Engineering Transactions",

issn = "2283-9216",

publisher = "Italian Association of Chemical Engineering - AIDIC",

}