Implementing virtual metrology into semiconductor production processes - An investment assessment
- Matthias Koitzsch
- , Jochen Merhof
- , Markus Michl
- , Humbert Noll
- , Alexander Nemecek
- , Alfred Honold
- , Gerhard Kleineidam
- , Holger Lebrecht
- Fraunhofer IISB
- FAPS University of Erlangen-Nuremberg
- University of Applied Sciences
- InReCon AG
- Infineon Technologies AG, Austria
Publikation: Beitrag in Buch/Bericht/Konferenzband › Konferenzbeitrag › peer-review
3
Zitate
(Scopus)