@inproceedings{7b217183958f46feb1fd9d5a3559ce17,
title = "Implementing virtual metrology into semiconductor production processes - An investment assessment",
author = "Matthias Koitzsch and Jochen Merhof and Markus Michl and Humbert Noll and Alexander Nemecek and Alfred Honold and Gerhard Kleineidam and Holger Lebrecht",
note = "Funding Information: This research was supported by the U. S. Army Research Office under the contract number DAAG55-98-1-0215.; 2011 Winter Simulation Conference, WSC 2011 ; Conference date: 11-12-2011 Through 14-12-2011",
year = "2011",
doi = "10.1109/WSC.2011.6147915",
language = "English",
isbn = "9781457721083",
series = "Proceedings - Winter Simulation Conference",
pages = "2017--2028",
booktitle = "Proceedings of the 2011 Winter Simulation Conference, WSC 2011",
}