Capacity planning for cluster tools in the semiconductor industry

TY - JOUR

T1 - Capacity planning for cluster tools in the semiconductor industry

AU - Romauch, Martin

AU - Hartl, Richard F.

N1 - Publisher Copyright: © 2017 Elsevier B.V.

PY - 2017/12

Y1 - 2017/12

KW - Capacity planning

KW - Cluster tool

KW - Duality

KW - Linear programming

KW - Semiconductor industry

UR - https://www.scopus.com/pages/publications/85013392448

U2 - 10.1016/j.ijpe.2017.01.005

DO - 10.1016/j.ijpe.2017.01.005

M3 - Article

AN - SCOPUS:85013392448

SN - 0925-5273

VL - 194

SP - 167

EP - 180

JO - International Journal of Production Economics

JF - International Journal of Production Economics

ER -