@article{e090f8e4f05e4ef4b379d5462b11e27b,
title = "Capacity planning for cluster tools in the semiconductor industry",
keywords = "Capacity planning, Cluster tool, Duality, Linear programming, Semiconductor industry",
author = "Martin Romauch and Hartl, \{Richard F.\}",
note = "Publisher Copyright: {\textcopyright} 2017 Elsevier B.V.",
year = "2017",
month = dec,
doi = "10.1016/j.ijpe.2017.01.005",
language = "English",
volume = "194",
pages = "167--180",
journal = "International Journal of Production Economics",
issn = "0925-5273",
publisher = "Elsevier B.V.",
}